不偏不倚--奈米級修準方法與敏感度評估之研究
Positive –A Study on a Nanoscale Revision Method and Sensitivity Evaluation This paper took a pyramid and a fixed point as the reference level. It was the intention of our team to establish and prove a new hardness value revising method that is to be used in the deflection of indentation of nano indentor. Such new method was named Material Surface Nanoscale Hardness Revision Method with which we re-measured various materials and error sensitivity of hardness values. We obtained the following conclusions:(1). This paper revision modification method have a highly precision. (2). When the round tip or plane tip was closed to ideal indentor tip, the contact areas during indentation process were close, not demonstrating significant difference. (3). The indentation triangle created when loading effort P was similar with the one left on the sample material when unloading the effort; thus, even though the sink-in and pile up effects due to the mechanical properties of sample material caused the differentiation of side lengths and two indentation areas, the angles of two indentation areas was the same. (4). When the effort was loaded by the tip onto the sample material, if the tip had a certain deflection ψ or rotation ω, the indentation triangle left on the sample material was still significant. (5). In the observation of the indentation triangle left on the sample material, when the triangle cannot become a regular triangle, it meant that there is a deflection or rotation happening to the tip and a further revision of the deflected angle ψ or rotated angle ω is required. (6). The hardness value revision method under indentation deflection situation had the best effect on the projected area revision; the second was on the indentation volume revision and than on the indentation contact area revision. (7). The hardness error sensitivity of hardness value revision method under indentation deflection situation had the best effect on the projected area; the second was on the contact area and than on the indentation volume revision. (8). The method proposed by this study was proved by the silica and aluminum single crystal indentation results and is thus able to be applied to the engineering in the nanoscale measurement of metal materials to obtain more precise data.不偏不倚-奈米級修準方法與敏感度評估之研究在這篇研究報告中，以一個三角錐和一個定點為基準，本團隊建立並證明一個新的在奈米硬度測試儀壓痕偏斜情況下，硬度值的修正方法，取名材料表面奈米硬度修正方法。在新的材料表面奈米硬度修正方法下，重新檢測各種材料及硬度誤差敏感度，得到許多好的結論：（1）本研究之修準方法具有高度精確性。（2）利用圓球尖端或平面尖端的方法近似理想壓頭時其壓痕過程中之接 觸面積相近，並無明顯差異。（3）作用力P 施加(Loading)時之壓痕三角形與卸載時(unloading)殘留於測試材料上之壓痕三角形係屬於相似形；因此，即使各該三角形之邊長因為該測試材料本身的機械性質所產生的滲入(sink-in)與堆放(pile-up)的效應而造成作用力施加與卸載時，壓痕面積上的差異。不過，該兩壓痕面積的角度卻是一致的。（4）當該作用力隨著該壓頭施加於測試材料時，若該壓頭產生某一程度的偏斜ψ 或旋轉ω 時，該殘留於測試材料上之壓痕三角形仍然具有代表性。（5）藉由觀察該殘留於測試材料上之壓痕三角形，當該三角形無法成為一正三角形時，其係表示壓頭已產生偏斜或旋轉的之情況，需要進一步對該偏斜角度ψ 或旋轉角度ω 進行修正。（6）在壓痕偏斜情況下硬度值的修正方法以投影面積修正為最佳，其次是壓痕體積再其次是壓痕接觸面積方法作修正。（7）在壓痕偏斜情況下硬度值修正方法的硬度誤差敏感度則以投影面積為最佳，其次是接觸面積再其次是壓痕體積修正方法。（8）本研究提出之修正方法經由矽、鋁單晶壓痕結果驗證，足以說明適用於工程學上金屬材料進行奈米壓痕硬度檢測時更精確的數據獲得。